Shanghai Industrial Technology Research Institute has achieved breakthrough in the field of uncooled infrared detector technology

In recent years, with the rapid development of integrated circuits and micro-electromechanical systems (MEMS) technology, the technology of uncooled infrared focal plane array detectors has gradually matured, and a series of products have been put into mass production. Shanghai Industrial Technology Research Institute focuses on the research and development of core processes of Beyond Moore integrated circuits, and has been deploying uncooled infrared detector technology since 2018. Through years of technical research and breakthroughs, a complete set of infrared sensor process platforms consisting of standard module processes have been successfully established. At present, Shanghai Industrial Technology Research Institute has provided general processes and customized process services for uncooled infrared detectors to many important customers, including amorphous silicon and vanadium oxide (VOx) technology routes. Many products have entered the mass production stage with excellent performance. In terms of product size, Shanghai Industrial Technology Research Institute has successfully mass-produced 17μm and 12μm products, and the 8μm pixel product has also completed technical development and started small-scale mass production. In addition, Shanghai Industrial Technology Research Institute also provides ultra-large array products with different pixels from small to large to help customers improve product competitiveness.