The performance of Zhongke Microsensing MEMS hydrogen sensor has been significantly improved

Zhongke Microsense's MEMS hydrogen sensor has achieved significant improvements in performance. Taking the CM-A107S model as an example, this sensor has achieved mass production of 10,000 pieces at the wafer level. The consistency deviation of the initial resistance and response value of a single LGA-packaged MEMS hydrogen sensor is close to 5%, and the yield rate is close to 98%. This achievement will provide a solid foundation for the popularization of artificial intelligence olfactory sensors and provide standardized low-cost hardware solutions for future odor digital applications.