ASML's Twinscan NXE:3800E system performance improvement

According to the 2021 roadmap released by ASML, the Twinscan NXE:3800E system will have significant improvements in alignment accuracy and productivity compared to the previous generation 3600D, with a throughput of up to 195 wafers per hour, an increase of nearly 22% compared to the 160 wafers of the 3600D, and is expected to reach the target of 220 wafers per hour.