公司之前提到已有光刻對準檢驗機產品並中標過上海新微半導體採購項目,請問光刻對準檢驗機載半導體光刻各流程環節中起什麼作用?國產替代前景如何?謝謝
賓士EQE SUV
天準科技
2021年
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2023-09-12 08:37
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天準科技:您好,感謝對公司的關注。 MueTec於2021年中標上海新微套刻誤差測量設備。套刻(Overlay)誤差量測設備主要用於量測半導體製造製程中前後疊層之間對準的套刻誤差,MueTec的套刻(Overlay)誤差量測設備可涵蓋65-90nm製程節點,目前公司蘇州團隊和MueTec團隊正在合作開發更先進製程的套刻誤差量測設備。
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