Successful integration of KNN thin film on 8-inch silicon wafer

Sumitomo Chemical Co., Ltd. of Japan recently announced that it has successfully deposited KNN thin films on large-size (8-inch) silicon wafers and achieved good thickness uniformity. This achievement provides important support for the commercialization of KNN thin films and helps meet the needs of the piezoelectric MEMS industry. In addition, researchers from Grenoble Alpes University and Rennes 1 University in France also integrated the most advanced KNN thin films into MEMS actuators using industrial compatible processes on an 8-inch silicon wafer technology platform.