Axcelis Delivers Multiple Batch of Ion Implanters to World's Leading Silicon Carbide Power Device Manufacturer

On April 17, Axcelis, a supplier of semiconductor ion implantation equipment, announced the delivery of multiple batches of Purion Power system ion implanters to the world's leading silicon carbide (SiC) power device manufacturers. These equipment include Purion H200 SiC high current, Purion XE SiC high energy and Purion M SiC medium current implanters, and the shipment was completed in the first quarter. These 6-inch (150mm) and 8-inch (200mm) equipment will be used to support the mass production of power devices for automotive, industrial, energy and other power-intensive applications.