Introduction to types of lithography machines and main models of ASML

The types of lithography machines are mainly divided into I-line, KrF, ArF dry, ArF immersion and EUV. Among them, EUV is the most advanced type. ASML's main models include: I-line's XP 400/450 series, corresponding to the process of 300~500nm; KrF's XT860/1060, corresponding to the process of 180~130nm; ArF dry XT1400/1460/1700, corresponding to the process node of about 130~65nm; ArF immersion XT1900 and NXT series, including NXT1950/1965/1970/1980 and NXT2000/2050/2100, corresponding to the process of about 45nm or less. The main model of EUV is NXE3400/3600, corresponding to 7nm or less.