ASML acquires Mapper, where will electron beam lithography technology go?

Under pressure from the United States, Mona Keijzer, the Dutch State Secretary for Economic Affairs and Climate, requested ASML to acquire the bankrupt Mapper. Although ASML was not very interested in Mapper's electron beam lithography technology, it was quite interested in its technology and patent knowledge, especially its application in semiconductor defect detection. ASML won Mapper at an auction for 75 million euros and incorporated its 240 employees.