Lam Research Launches World's First Production-Ready Pulsed Laser Deposition Tool

Lam Research recently launched the world's first mass-production-oriented pulsed laser deposition (PLD) tool, designed to improve the performance of next-generation microphones and radio frequency (RF) filters based on MEMS technology. This system, called Pulsus™ PLD, can provide scandium-doped aluminum nitride (AlScN) films with higher scandium content, paving the way for high-performance devices in the consumer and automotive fields. Currently, Pulsus™ has begun shipping to some specialty MEMS device manufacturers.