Axcelis wins order to deliver Purion EXE™ SiC high-energy ion implanter to Japanese power device manufacturer

Axcelis announced that it has delivered the Purion EXE™ SiC high-energy ion implanter to a leading Japanese power device chip manufacturer and completed the evaluation loop of the Purion H200™ SiC ion implanter. These equipment will be used in the production of 150mm and 200mm silicon carbide power devices.