Tsinghua University and Lianke Semiconductor signed a cooperation agreement on large-size silicon carbide resistance furnace and epitaxial furnace project

In November 2023, Tsinghua University and Lianke Semiconductor signed a cooperation agreement on large-size silicon carbide resistance furnace and epitaxial furnace projects. The two parties will jointly promote the research and development of silicon carbide resistance furnace and epitaxial furnace technology to help the development of China's semiconductor industry.