China Electronics Technology Group Corporation 48th Institute successfully achieved the first large-scale batch shipment of SiC epitaxial equipment

On February 9, 2025, 30 sets of SiC epitaxial equipment from China Electronics Technology Group Corporation 48th Institute were successfully shipped in batches, which was the first time that the 48th Institute achieved large-scale batch shipments. These devices are specially built for SiC equipment links, aiming to improve equipment performance and efficiency, achieve higher yields and lower defect levels. At present, more than 100 sets of the equipment have been successfully shipped and are running stably at the customer's site.