ASML and imec collaborate on high-end node technology to support R&D below 2nm

Under the collaboration agreement, ASML and imec will leverage ASML’s high-end node technologies such as 0.55 NA EUV, 0.33 NA EUV, DUV immersion, YieldStar optical metrology, and HMI single-beam and multi-beam technologies to provide the international semiconductor ecosystem with state-of-the-art sub-2nm R&D infrastructure.